Polysilicon piezoresistive cantilevers for intermolecular force detection

Author

Villanueva, G. ; Bausells, J. ; Montserrat, J. ; Perez-Murano, F.

Author_Institution

Centro Nacional de Microelectron., IMB-CSIC, Barcelona, Spain

fYear

2005

fDate

2-4 Feb. 2005

Firstpage

495

Lastpage

498

Abstract

We describe the development of polycrystalline silicon piezoresistive micro/nanocantilevers for the measurement of intermolecular forces in biochemical sensing. The cantilevers have been fabricated both in a dedicated technology and in a commercial CMOS technology with an additional micromachining postprocessing. The sensitivity and resolution required by the application are achieved with cantilevers with submicrometer thickness and width in the micrometer range. The cantilevers have been successfully tested by applying a known displacement with an AFM, obtaining a value of 12 for the gauge factor.

Keywords

CMOS integrated circuits; biomolecular electronics; biosensors; chemical sensors; intermolecular forces; micromachining; piezoresistive devices; AFM; CMOS technology; biochemical sensing; gauge factor; intermolecular force detection; micromachining postprocessing; piezoresistive microcantilever; piezoresistive nanocantilever; polycrystalline silicon; polysilicon piezoresistive cantilever; Atomic force microscopy; CMOS process; CMOS technology; Force measurement; Micromachining; Piezoresistance; Silicon; Springs; Testing; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices, 2005 Spanish Conference on

Conference_Location

Tarragona

Print_ISBN

0-7803-8810-0

Type

conf

DOI

10.1109/SCED.2005.1504494

Filename

1504494