DocumentCode
1935387
Title
Thermal conductivity microsensor to measure the methane number of natural gas
Author
Puente, D. ; Gracia, Fco J. ; Ayerdi, I.
Author_Institution
Centro de Estudios e Investigaciones Tecnicas de Gipuzkoa, San Sebastian, Spain
fYear
2005
fDate
2-4 Feb. 2005
Firstpage
499
Lastpage
502
Abstract
Methane number is the parameter used to quantify knocking tendency of a combustible gas, parameter especially relevant when said gas is used as engines fuel. The present paper proposes a new method to determine on line the methane number of natural gas. The method is based on the measurement of the gas thermal conductivity and the correlation between this parameter and the methane number of natural gas. The developed thermal conductivity microsensor is ascribed to microsystems technology. It integrates two Pt thermoresistors each patterned on a microbridge, defined in turn in the silicon substrate by surface micromachining. Porous silicon is used as sacrificial layer. In the considered methane number range (60-100), a linear output with a sensitivity of 0.95mV/1MN is obtained when a 50mA constant current is applied to the sensing thermoresistor. Furthermore, microdevice is mounted in a gas line rig in order to test it in field. Additional tests are still required but it can be concluded that developed microsensor is a valid alternative to measure in situ the methane number of natural gas.
Keywords
gas mixtures; gas sensors; micromachining; microsensors; thermal conductivity; thermistors; Pt thermoresistors; combustible gas; engine fuel; gas line rig; gas thermal conductivity; methane number; microbridge; microdevice; microsystems technology; natural gas; porous silicon; sacrificial layer; surface micromachining; thermal conductivity microsensor; Conductivity measurement; Engines; Fuels; Micromachining; Microsensors; Natural gas; Silicon; Testing; Thermal conductivity; Thermoresistivity;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices, 2005 Spanish Conference on
Conference_Location
Tarragona
Print_ISBN
0-7803-8810-0
Type
conf
DOI
10.1109/SCED.2005.1504495
Filename
1504495
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