Title :
Characterization of N-in-N microstrip radiation detectors fabricated on different silicon substrates
Author :
Fleta, C. ; Lozano, M. ; Campabadal, F. ; Pellegrini, G. ; Rafí, J.M. ; Ullán, M. ; Casse, G. ; Allport, P.P.
Author_Institution :
Inst. de Microelectron. de Barcelona, CNM-CSIC, Barcelona, Spain
Abstract :
N-in-N microstrip radiation detectors have been fabricated at the IMB-CNM facilities on standard float zone, diffusion oxygenated float zone and magnetic Czochralski silicon substrates. A first electrical characterization shows that the devices have a good behavior, with low leakage currents and an average full depletion voltage of 55 V for the devices processed on float zone silicon and 330 V for those processed on Czochralski material.
Keywords :
crystal growth from melt; particle detectors; silicon; zone melting; Czochralski material; N-in-N microstrip radiation detector; diffusion oxygenated float zone; float zone silicon; leakage currents; magnetic Czochralski; Atomic measurements; Collaboration; Conductivity; Fabrication; Lattices; Microstrip; Radiation detectors; Silicon radiation detectors; Strips; Voltage;
Conference_Titel :
Electron Devices, 2005 Spanish Conference on
Conference_Location :
Tarragona
Print_ISBN :
0-7803-8810-0
DOI :
10.1109/SCED.2005.1504502