DocumentCode
1935789
Title
FEM simulations to estimate the polymer thickness deposited over mechanical resonators
Author
Morata, M. ; García, M. ; Santos, J.P. ; Sayago, I. ; Fernandez, M.J. ; Horrillo, M.C. ; Figueras, E. ; Fonseca, L. ; Santander, J. ; Gràcia, I. ; Cané, C.
Author_Institution
Inst. de Microelectron. de Barcelona, CNM-CSIC, Bellaterra, Spain
fYear
2005
fDate
2-4 Feb. 2005
Firstpage
541
Lastpage
544
Abstract
Measurements of polymer thicknesses deposited over resonant structures are difficult to carry out through optical or mechanical techniques. This paper proposes to estimate the equivalent thickness of the sensitive layer using FEM simulations. Resonant frequency before and after the polymer (PEUT or PDMS) has been sprayed showed that thicknesses varied between 0.1 μm and 6.5 μm.
Keywords
chemical sensors; finite element analysis; microsensors; polymers; thickness measurement; 0.1 to 6.5 micron; FEM simulations; equivalent thickness; mechanical resonators; mechanical technique; optical technique; polymer thickness; resonant frequency; Actuators; Chemical sensors; Optical polymers; Optical resonators; Resonance; Resonant frequency; Silicon; Spraying; Temperature sensors; Vibrations;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices, 2005 Spanish Conference on
Conference_Location
Tarragona
Print_ISBN
0-7803-8810-0
Type
conf
DOI
10.1109/SCED.2005.1504509
Filename
1504509
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