Title :
Micromachined silicon microstructures for gas sensors
Author :
Amírola, J. ; Rodríguez, A. ; Castaner, Luis ; Horrillo, M.C. ; Gutiérrez, F.J.
Author_Institution :
Grupo de Dispositivos Semiconductores, Univ. Politecnica de Cataluna, Barcelona, Spain
Abstract :
Devices studied in this work consist of monocrystalline silicon micromachined cantilevers, obtained through the bulk micromachining of a BESOI (back etch silicon on insulator) wafer. Cantilevers are functionalized by means of a sensitive polymer layer. These devices have been employed in the detection of volatile organic compounds (VOCs) through different transduction principles. State-of-the-art sensitivities have been obtained.
Keywords :
gas sensors; microactuators; micromachining; microsensors; organic compounds; silicon; silicon-on-insulator; Si; back etch silicon on insulator; bulk micromachining; gas sensors; monocrystalline silicon micromachined cantilevers; polymer layer; silicon microstructures; transduction; volatile organic compounds; Atomic force microscopy; Capacitance; Etching; Gas detectors; Micromachining; Microstructure; Polymers; Resonance; Resonant frequency; Silicon;
Conference_Titel :
Electron Devices, 2005 Spanish Conference on
Conference_Location :
Tarragona
Print_ISBN :
0-7803-8810-0
DOI :
10.1109/SCED.2005.1504518
