• DocumentCode
    1936124
  • Title

    Incorporating orthogonal multivariate methods to increase effectiveness

  • Author

    Byrne, Tamara

  • Author_Institution
    MKS Instrum., San Jose, CA, USA
  • fYear
    2012
  • fDate
    4-4 Sept. 2012
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Traditional multivariate projection methods including PLS and PLS-DA attempt to find covariation between sets of data. In the case of PLS, the two sets of data are most often process variables and metrology variables. In the case of PLS-DA, the sets of data are usually from different chambers or before and after a maintenance or scrap event. The powerful thing about PLS and its extensions is that it not only provides information about how the variables are correlated, it also provides information about variation within the individual sets of data. The problem with this is that these two types of information are confounded with each other making it difficult to understand which variation is correlated (predictive) and which variation is not (orthogonal).
  • Keywords
    least squares approximations; maintenance engineering; measurement; PLS method; PLS-DA method; maintenance; metrology variable; multivariate projection method; orthogonal multivariate method; orthogonal variation; partial least squares; predictive variation; process variable; scrap event; Data models; Instruments; Maintenance engineering; Metrology; Rapid thermal processing; Real-time systems;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    e-Manufacturing & Design Collaboration Symposium (eMDC), 2012
  • Conference_Location
    HsinChu
  • Print_ISBN
    978-1-4673-4540-8
  • Type

    conf

  • DOI
    10.1109/eMDC.2012.6338421
  • Filename
    6338421