DocumentCode
1936124
Title
Incorporating orthogonal multivariate methods to increase effectiveness
Author
Byrne, Tamara
Author_Institution
MKS Instrum., San Jose, CA, USA
fYear
2012
fDate
4-4 Sept. 2012
Firstpage
1
Lastpage
2
Abstract
Traditional multivariate projection methods including PLS and PLS-DA attempt to find covariation between sets of data. In the case of PLS, the two sets of data are most often process variables and metrology variables. In the case of PLS-DA, the sets of data are usually from different chambers or before and after a maintenance or scrap event. The powerful thing about PLS and its extensions is that it not only provides information about how the variables are correlated, it also provides information about variation within the individual sets of data. The problem with this is that these two types of information are confounded with each other making it difficult to understand which variation is correlated (predictive) and which variation is not (orthogonal).
Keywords
least squares approximations; maintenance engineering; measurement; PLS method; PLS-DA method; maintenance; metrology variable; multivariate projection method; orthogonal multivariate method; orthogonal variation; partial least squares; predictive variation; process variable; scrap event; Data models; Instruments; Maintenance engineering; Metrology; Rapid thermal processing; Real-time systems;
fLanguage
English
Publisher
ieee
Conference_Titel
e-Manufacturing & Design Collaboration Symposium (eMDC), 2012
Conference_Location
HsinChu
Print_ISBN
978-1-4673-4540-8
Type
conf
DOI
10.1109/eMDC.2012.6338421
Filename
6338421
Link To Document