A key parameter analysis-and-selection system “eProcessKey”

Author

Kao, Chi-An ; Cheng, Chih-Hsuan ; Cheng, Fan-Tien

fYear

2012

fDate

4-4 Sept. 2012

Firstpage

1

Lastpage

2

Abstract

The paper states that Foresight Technology Company Ltd. developed the product called “eProcessKey”. The inputs of the eProcessKey include the process data and metrology data of a target machine. Depending on various applications, the process data may contain the prior-process historical data, the current process step H/W and process data, as well as the product context data. Further, the outputs of the eProcessKey comprise the outcomes of product-characteristics analysis and key-variables identification as well as the simulation results of product-quality optimization and the recommended settings of the key-parameters´ specification for better production-quality management.

Keywords

data handling; parameter estimation; production engineering computing; production management; quality management; Foresight Technology Company Limited; eProcessKey product; key-variables identification; metrology data; parameter analysis system; parameter selection system; prior-process historical data; process data; product context data; product-characteristics analysis; product-quality optimization; production-quality management; Companies; Films; Metrology; Preventive maintenance; Production; Resistance; Sensitivity; Design of experiments (DOE); Intelligent simulator; Key parameter analysis; Sensitivity-analysis tool; eProcessKey;

fLanguage

English

Publisher

ieee

Conference_Titel

e-Manufacturing & Design Collaboration Symposium (eMDC), 2012

Conference_Location

HsinChu

Print_ISBN

978-1-4673-4540-8

Type

conf

DOI

10.1109/eMDC.2012.6338423

Filename

6338423