• DocumentCode
    1936242
  • Title

    FEM analysis of thin-film inductors used in GHz frequency bands

  • Author

    Tanabe, Shinji ; Shiraki, Yasuhiro ; Ito, Kenji ; Yamaguchi, Masahiro ; Arai, Ken-Ichi

  • Author_Institution
    ATC
  • fYear
    1999
  • fDate
    18-21 May 1999
  • Keywords
    Coils; Conductive films; Conductivity; Frequency; Inductance; Magnetic films; Maxwell equations; Permeability; Spirals; Thin film inductors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Magnetics Conference, 1999. Digest of INTERMAG 99. 1999 IEEE International
  • Conference_Location
    Kyongju, Korea
  • Print_ISBN
    0-7803-5555-5
  • Type

    conf

  • DOI
    10.1109/INTMAG.1999.837938
  • Filename
    837938