Title :
FEM analysis of thin-film inductors used in GHz frequency bands
Author :
Tanabe, Shinji ; Shiraki, Yasuhiro ; Ito, Kenji ; Yamaguchi, Masahiro ; Arai, Ken-Ichi
Keywords :
Coils; Conductive films; Conductivity; Frequency; Inductance; Magnetic films; Maxwell equations; Permeability; Spirals; Thin film inductors;
Conference_Titel :
Magnetics Conference, 1999. Digest of INTERMAG 99. 1999 IEEE International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-5555-5
DOI :
10.1109/INTMAG.1999.837938
