DocumentCode
1936273
Title
An application of d-JADE controller in thin film processes
Author
Yang, James
Author_Institution
Nanya Technol. Corp., Taiwan
fYear
2012
fDate
4-4 Sept. 2012
Firstpage
1
Lastpage
2
Abstract
This paper demonstrates an algorithm “double Just-in-time Adaptive Disturbance Estimation (d-JADE)” for use in on-line run-to-run control. This method is used to adaptively identify the contributions to variation from each individual context item. Through monitoring the data of both EWMA and d-JADE algorithms on-line, it appears that d-JADE provides increasingly superior performance in state estimation over EWMA.
Keywords
adaptive control; control system synthesis; manufacturing processes; semiconductor device manufacture; thin films; EWMA algorithm; d-JADE controller; data monitoring; double just-in-time adaptive disturbance estimation; online run-to-run control; state estimation; thin film process; Algorithm design and analysis; Context; Estimation; Feedback loop; Monitoring; Process control; Radio frequency; High-mix; JADE; R2R;
fLanguage
English
Publisher
ieee
Conference_Titel
e-Manufacturing & Design Collaboration Symposium (eMDC), 2012
Conference_Location
HsinChu
Print_ISBN
978-1-4673-4540-8
Type
conf
DOI
10.1109/eMDC.2012.6338427
Filename
6338427
Link To Document