• DocumentCode
    1936304
  • Title

    FDC coverage improvement infrastructure

  • Author

    Lain Hua Shih ; Cheng, Ming ; Hseih, T.

  • Author_Institution
    United Microelectron. Corp., Hsinchu, Taiwan
  • fYear
    2012
  • fDate
    4-4 Sept. 2012
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Traditional method of selecting SVID, setting up FDC models and SPC alarm rules often depends on past experiences and abnormal cases. It´s hard to achieve the overall FDC coverage across different tool types. This paper adopts EQ subsystems concept into FDC model template and roll out these models throughout the fab by using combine charts. It can rapidly improve FDC coverage rate and hit rate for tool abnormity.
  • Keywords
    control charts; machine tools; statistical process control; EQ subsystem; FDC coverage; FDC coverage rate; FDC hit rate; FDC model; SPC alarm rule; SVID selection; combine chart; statistical process control; tool abnormity; tool type; Data models; Helium; Monitoring; Radio frequency; Temperature measurement; Temperature sensors; Valves; EQ Subsystems; FDC;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    e-Manufacturing & Design Collaboration Symposium (eMDC), 2012
  • Conference_Location
    HsinChu
  • Print_ISBN
    978-1-4673-4540-8
  • Type

    conf

  • DOI
    10.1109/eMDC.2012.6338428
  • Filename
    6338428
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1936304