DocumentCode
1936406
Title
A theoretical study on dielectric constants of SiO2-rich Zr silicates for high-k CMOS gate insulator applications
Author
Hamada, T. ; Maruizumi, T.
Author_Institution
Adv. Res. Lab., Hitachi Ltd., Tokyo, Japan
fYear
2001
fDate
1-2 Nov. 2001
Firstpage
174
Lastpage
178
Abstract
This study is the first theoretical attempt to investigate the unusually high dielectric constant of SiO/sub 2/-rich Zr silicates at the atomic level. Structures of two model SiO/sub 2/-rich Zr silicates were estimated by means of an electronic structure method, and electronic dielectric constants of the model silicates were calculated from their electronic structure. Results showed that the electronic dielectric constants of the model silicates are similar to that of SiO/sub 2/.
Keywords
band structure; dielectric thin films; permittivity; zirconium compounds; SiO/sub 2/-rich Zr silicates; ZrSiO; dielectric constants; electronic dielectric constants; electronic structure; electronic structure method; high-k CMOS gate insulator applications; Chemicals; Dielectric constant; Dielectric materials; Dielectrics and electrical insulation; Hafnium; High K dielectric materials; High-K gate dielectrics; Laboratories; Linear discriminant analysis; Zirconium;
fLanguage
English
Publisher
ieee
Conference_Titel
Gate Insulator, 2001. IWGI 2001. Extended Abstracts of International Workshop on
Conference_Location
Tokyo, Japan
Print_ISBN
4-89114-021-6
Type
conf
DOI
10.1109/IWGI.2001.967577
Filename
967577
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