• DocumentCode
    1936462
  • Title

    FOUP environment control and condense reduction

  • Author

    Kuo, Yiting ; Tsao, Howard ; Luoh, Tuung ; Yang, Ling-Wu ; Yang, Tahone ; Chen, Kuang-Chao ; Lu, Chih-Yuan

  • Author_Institution
    Technol. Dev. Center, Macronix Int. Co. Ltd., Hsinchu, Taiwan
  • fYear
    2012
  • fDate
    4-4 Sept. 2012
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    The effects on the mini-environment of FOUP (Front Opening Unified Pod) by N2 purge are evaluated with various processes. From the experimental results, it is effective to suppress the formation of condense defect, corrosion defect and extend the queue time at critical process steps.
  • Keywords
    air pollution control; contamination; corrosion; integrated circuit manufacture; nitrogen; FOUP condense reduction; FOUP environment control; condense defect formation; corrosion defect; front opening unified pod; integrated circuit; minienvironment effect; nitrogen purge; Corrosion; Humidity; Integrated circuits; Surface cleaning; Surface contamination; Condense; Defect; FOUP Contamination; Ionic Chromatography Analysis; N2 Purge;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    e-Manufacturing & Design Collaboration Symposium (eMDC), 2012
  • Conference_Location
    HsinChu
  • Print_ISBN
    978-1-4673-4540-8
  • Type

    conf

  • DOI
    10.1109/eMDC.2012.6338434
  • Filename
    6338434
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1936462