DocumentCode
1937118
Title
Analysis of the Specific ON-resistance in Conventional VDMOS Transistors
Author
Fernandez, J. ; Paredes, J. ; Hidalgo, S. ; Domínguez, C. ; Berta, F. ; Rebollo, J. ; Millan, J.
Author_Institution
Centro Nacional de Microelectrónica (CNM), CSIC-UAB, 08193 Bellaterra., Barcelona. Spain.
fYear
1989
fDate
11-14 Sept. 1989
Firstpage
531
Lastpage
534
Abstract
A distributed modellization of the specific ON-resistance is experimentally corroborated for VDMOS transistors with different cellular designs. The results for low voltage capability devices show differences for the optinmum percentage of the cell area outside the body at which the minimum of the specific ON-resistance occurs and for this minimum value compared with previous formulations. In addition, a new VDMOS design with a waved gate electrode is reported, which seems to be attractive for medium voltage applications.
Keywords
Analytical models; Constraint optimization; Current density; Driver circuits; Electrodes; Epitaxial layers; Immune system; Low voltage; Medium voltage; Semiconductor process modeling;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1989. ESSDERC '89. 19th European
Conference_Location
Berlin, Germany
Print_ISBN
0387510001
Type
conf
Filename
5436551
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