Title :
Micro-machined dual slider-suspension for near-contact and contact recording
Author :
Sheng, Gang ; Liu, Bo ; Hua, Wei ; Xu, Bai ; Mia, Yutu ; Sridhar, Uppilli
Author_Institution :
Data Storage Institute
Keywords :
Disk drives; Disk recording; Etching; Frequency; Interference; Memory; Microelectronics; Prototypes; Silicon; Vibrations;
Conference_Titel :
Magnetics Conference, 1999. Digest of INTERMAG 99. 1999 IEEE International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-5555-5
DOI :
10.1109/INTMAG.1999.837980