DocumentCode :
1938277
Title :
Numerical Simulation of Gas Flow and Temperature in a Diffusion Furnace
Author :
Howell, S. ; Ulacia F., J.I. ; Werner, Ch.
Author_Institution :
Siemens AG., Corporate Research and Development, EL PT 33,8000 Munich 83, West Germany.
fYear :
1989
fDate :
11-14 Sept. 1989
Firstpage :
302
Lastpage :
305
Keywords :
Conductivity; Design optimization; Equations; Fluid flow; Furnaces; Manufacturing automation; Manufacturing processes; Numerical simulation; Semiconductor device modeling; Temperature distribution;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid State Device Research Conference, 1989. ESSDERC '89. 19th European
Conference_Location :
Berlin, Germany
Print_ISBN :
0387510001
Type :
conf
Filename :
5436607
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1938277
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