Title :
CMOS-compatible nonuniform grating coupler with 86% coupling efficiency
Author :
Zaoui, Wissem Sfar ; Kunze, Andreas ; Vogel, Wolfgang ; Berroth, Manfred ; Butschke, Jorg ; Letzkus, Florian
Author_Institution :
Inst. of Electr. an Opt. Commun. Eng., Univ. of Stuttgart, Stuttgart, Germany
Abstract :
We report a highly efficient grating coupler fabricated using a CMOS-compatible technology process with a record efficiency of -0.64 dB (86.3 %) at a wavelength of 1527 nm and a 1dB-bandwidth of 44 nm. The performance of the structure is enhanced through a backside metal mirror and the use of a nonuniform grating.
Keywords :
CMOS integrated circuits; diffraction gratings; mirrors; optical couplers; CMOS-compatible technology; backside metal mirror; efficiency 86 percent; efficiency 86.3 percent; nonuniform grating coupler; wavelength 1527 nm;
Conference_Titel :
Optical Communication (ECOC 2013), 39th European Conference and Exhibition on
Conference_Location :
London
Electronic_ISBN :
978-1-84919-759-5
DOI :
10.1049/cp.2013.1279
