Controlled coupling of single color centers to a photonic crystal cavity in monocrystalline diamond

Summary form only given. Deterministic coupling of a single emitter to a photonic crystal cavity is an important step towards the realization of integrated solid-state devices for quantum photonics. As single emitters, color centers in diamond, e.g. the Nitrogen-Vacancy (NV) center or the Silicon-Vacancy (SiV) center have attracted significant interest due to their extraordinary properties like long spin-coherence times or narrowband and bright single photon emission, respectively. For the realization of recent proposals like cavity-enhanced spin measurements or cavity-enhanced single photon sources, it is necessary to couple single color centers to a cavity with small mode volume and high quality factor. Photonic crystal cavities directly fabricated within a monocrystalline diamond membrane are well suited for this task, as they offer tiny mode volumes for efficient emitter-cavity coupling as well as scalable architectures for integrated photonic devices.In order to achieve controlled coupling of a color center to a photonic crystal cavity, several challenges have to be tackled, e.g. exact emitter positioning and alignment of its dipole moment with the cavity electric field as well as the ability for cavity tuning. For deterministic emitter-cavity positioning, two different routes can be pursued: In the first approach, a single emitter is localized within the diamond, its dipole orientation is determined and the cavity is subsequently structured around it. In the second approach, the cavity is fabricated first and a single color center is created within the cavity, e.g. via ion implantion or creation of vacancies. Here we present strategies to realize both methods for deterministic emitter-cavity coupling. For the first approach, we use a monocrystalline diamond film containing single SiV centers. Figure 1a) shows a fluorescence scan of a single SiV center with position markers next to it. The position markers are subsequently used to structure a photonic crystal - avity around the color center using focused ion beam milling [1]. Figures 1b) and c) show SEMimages before and after the cavity fabrication. The photonic crystal lattice constant a ≈ 283nm is chosen such that the cavity modes are red shifted with respect to the SiV emission lines. Using an oxidation tuning method, the cavity modes are tuned into resonance with the zero-phonon line at 740nm of a single SiV center (see Fig. 1d)). On resonance, we measure an intensity enhancement by a factor of 3.8 compared to the off-resonant case.