DocumentCode
1939064
Title
Fabrication of 3D photonic crystal from 2D photonic plates by micromanipulation
Author
Aoki, Kazuo ; Miyazaki, H.T. ; Hirayama, H. ; Inoshita, K. ; Baba, T. ; Shinya, N. ; Aoyagi, Y.
Author_Institution
RIKEN, Japan
Volume
1
fYear
2001
fDate
15-19 July 2001
Abstract
We have proposed a new fabrication method of 3D photonic crystal. Those crystals were made by stacking 2D photonic plates by micromanipulation. Exact stacking was achieved using polystyrene microsphere as a stopper.
Keywords
MOCVD; electron beam lithography; micromanipulators; optical fabrication; optical planar waveguides; photonic band gap; scanning electron microscopy; sputter etching; 2D photonic plates; 3D photonic crystal; ECR etching; ICP etching; MOCVD; SEM image; air bridge structure; electron beam lithography; electron beam resist; exact stacking; fabrication method; integrated optical circuits; metal mask etching; micromanipulation; polystyrene microsphere stopper; precise alignment; quasi-diamond structure; woodpile structure; Bridge circuits; Bridges; Etching; Indium gallium arsenide; Indium phosphide; Lattices; Optical device fabrication; Photonic crystals; Probes; Stacking;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2001. CLEO/Pacific Rim 2001. The 4th Pacific Rim Conference on
Conference_Location
Chiba, Japan
Print_ISBN
0-7803-6738-3
Type
conf
DOI
10.1109/CLEOPR.2001.967703
Filename
967703
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