Title :
Fabrication of 3D photonic crystal from 2D photonic plates by micromanipulation
Author :
Aoki, Kazuo ; Miyazaki, H.T. ; Hirayama, H. ; Inoshita, K. ; Baba, T. ; Shinya, N. ; Aoyagi, Y.
Author_Institution :
RIKEN, Japan
Abstract :
We have proposed a new fabrication method of 3D photonic crystal. Those crystals were made by stacking 2D photonic plates by micromanipulation. Exact stacking was achieved using polystyrene microsphere as a stopper.
Keywords :
MOCVD; electron beam lithography; micromanipulators; optical fabrication; optical planar waveguides; photonic band gap; scanning electron microscopy; sputter etching; 2D photonic plates; 3D photonic crystal; ECR etching; ICP etching; MOCVD; SEM image; air bridge structure; electron beam lithography; electron beam resist; exact stacking; fabrication method; integrated optical circuits; metal mask etching; micromanipulation; polystyrene microsphere stopper; precise alignment; quasi-diamond structure; woodpile structure; Bridge circuits; Bridges; Etching; Indium gallium arsenide; Indium phosphide; Lattices; Optical device fabrication; Photonic crystals; Probes; Stacking;
Conference_Titel :
Lasers and Electro-Optics, 2001. CLEO/Pacific Rim 2001. The 4th Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-6738-3
DOI :
10.1109/CLEOPR.2001.967703
