DocumentCode
1939243
Title
Requirements for Device and Process Modeling of Submicron Devices
Author
Polak, S.J. ; Goossens, R.J.G. ; Cowern, N.E.B.
Author_Institution
Nederlandse Philips Bedrijven B.V., CFT Automation-CPS, Building SAQ-2, P.O. Box 218, 5600 MD Eindhoven, The Netherlands
fYear
1989
fDate
11-14 Sept. 1989
Firstpage
119
Lastpage
130
Abstract
In this paper the requirements for device and process modelling for submicron devices are discussed. Some examples are presented to illustrate the origins of these requirements. A framework for continuum-physics simulations is used to further outline the necessary facilities. Throughout the paper problems are considered from a numerical as well as a device-engineer´s point of view.
Keywords
Analytical models; Computer industry; Electronics industry; Industrial control; Integrated circuit modeling; Laboratories; Physics; Predictive models; Solid modeling; Tin;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1989. ESSDERC '89. 19th European
Conference_Location
Berlin, Germany
Print_ISBN
0387510001
Type
conf
Filename
5436652
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