DocumentCode
1941273
Title
Addressable test structures for MOSFET variability analysis
Author
Chitrashekaraiah, Sunil ; Guo, Shenglong ; Herberholz, Rainer ; Vigar, David ; Redford, Mark
Author_Institution
CSR Ltd., Cambridge, UK
fYear
2012
fDate
19-22 March 2012
Firstpage
31
Lastpage
35
Abstract
Aggressive scaling of CMOS transistors has increased variations in threshold voltages, drive currents and gains. In order to meet circuit performance targets, the designer requires detailed knowledge of variability to enable manufacturable products. This paper presents a 4-bit addressable array-based test structure with a centre reference transistor allowing evaluation of variability in advanced technologies. We demonstrate a method of verifying the region in which the measurements of transistors in the array are valid.
Keywords
MOSFET; semiconductor device testing; CMOS transistors; MOSFET variability analysis; addressable array-based test structure; aggressive transistor scaling; centre reference transistor; circuit performance targets; drive current; drive gain; manufacturable products; threshold voltage variations; variability evaluation; Integrated circuit modeling; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Test Structures (ICMTS), 2012 IEEE International Conference on
Conference_Location
San Diego, CA
ISSN
1071-9032
Print_ISBN
978-1-4673-1027-7
Type
conf
DOI
10.1109/ICMTS.2012.6190608
Filename
6190608
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