Title :
Addressable test structures for MOSFET variability analysis
Author :
Chitrashekaraiah, Sunil ; Guo, Shenglong ; Herberholz, Rainer ; Vigar, David ; Redford, Mark
Author_Institution :
CSR Ltd., Cambridge, UK
Abstract :
Aggressive scaling of CMOS transistors has increased variations in threshold voltages, drive currents and gains. In order to meet circuit performance targets, the designer requires detailed knowledge of variability to enable manufacturable products. This paper presents a 4-bit addressable array-based test structure with a centre reference transistor allowing evaluation of variability in advanced technologies. We demonstrate a method of verifying the region in which the measurements of transistors in the array are valid.
Keywords :
MOSFET; semiconductor device testing; CMOS transistors; MOSFET variability analysis; addressable array-based test structure; aggressive transistor scaling; centre reference transistor; circuit performance targets; drive current; drive gain; manufacturable products; threshold voltage variations; variability evaluation; Integrated circuit modeling; Transistors;
Conference_Titel :
Microelectronic Test Structures (ICMTS), 2012 IEEE International Conference on
Conference_Location :
San Diego, CA
Print_ISBN :
978-1-4673-1027-7
DOI :
10.1109/ICMTS.2012.6190608
