• DocumentCode
    1941829
  • Title

    Session 5: Process characterization

  • Author

    Smith, Brad ; Sekitani, Tsuyoshi

  • Author_Institution
    Freescale, USA
  • fYear
    2012
  • fDate
    19-22 March 2012
  • Firstpage
    129
  • Lastpage
    130
  • Abstract
    Start of the above-titled section of the conference proceedings record.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronic Test Structures (ICMTS), 2012 IEEE International Conference on
  • Conference_Location
    San Diego, CA
  • ISSN
    1071-9032
  • Print_ISBN
    978-1-4673-1027-7
  • Type

    conf

  • DOI
    10.1109/ICMTS.2012.6190630
  • Filename
    6190630
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1941829