Title :
A compact circuit for wafer-level monitoring of operational amplifier high-frequency performance using DC parametric test equipment
Author :
Sparling, Z.G. ; Tyree, Vance C. ; Cox, Nathan ; Vernier, P. Thomas
Author_Institution :
MOSIS Service, Univ. of Southern California, Marina del Rey, CA, USA
Abstract :
A test structure has been developed to permit wafer-level measurement of the frequency response of an operational amplifier having a unity gain frequency on the order of 2 GHz using DC measurement equipment. This paper describes the design issues associated with implementing this test structure along with test data obtained from three commercial fabrication runs in 180 nm CMOS.
Keywords :
CMOS analogue integrated circuits; UHF amplifiers; integrated circuit testing; operational amplifiers; CMOS; DC parametric test equipment; compact circuit; operational amplifier high frequency performance; wafer level monitoring; Attenuation measurement; CMOS integrated circuits; Floors; Frequency measurement; Frequency synchronization; Oscilloscopes; Reliability;
Conference_Titel :
Microelectronic Test Structures (ICMTS), 2012 IEEE International Conference on
Conference_Location :
San Diego, CA
Print_ISBN :
978-1-4673-1027-7
DOI :
10.1109/ICMTS.2012.6190633
