Title :
RF MEMS tunable inductor
Author :
Zine-El-Abidine, I. ; Okoniewski, M. ; McRory, J.G.
Author_Institution :
TRLabs, Calgary Univ., Alta., Canada
Abstract :
This paper reports a single-wafer micromachined radio-frequency (RF) inductor that can be integrated in a conventional RFIC device. The inductor achieved a quality factor greater than 9 at 5 GHz and a self-resonance frequency well above 15 GHz. The inductor is tunable and the inductance variation is greater than 8%.
Keywords :
Q-factor; inductors; micromechanical devices; microwave devices; tuning; 5 GHz; RF MEMS tunable inductor; inductance variation; self-resonance frequency; single-wafer micromachined radio-frequency inductor; Etching; Fabrication; Gold; Inductance; Inductors; Q factor; Radio frequency; Radiofrequency microelectromechanical systems; Silicon; Tunable circuits and devices;
Conference_Titel :
Microwaves, Radar and Wireless Communications, 2004. MIKON-2004. 15th International Conference on
Print_ISBN :
83-906662-7-8
DOI :
10.1109/MIKON.2004.1358483
