DocumentCode
1942087
Title
RF MEMS tunable inductor
Author
Zine-El-Abidine, I. ; Okoniewski, M. ; McRory, J.G.
Author_Institution
TRLabs, Calgary Univ., Alta., Canada
Volume
3
fYear
2004
fDate
17-19 May 2004
Firstpage
817
Abstract
This paper reports a single-wafer micromachined radio-frequency (RF) inductor that can be integrated in a conventional RFIC device. The inductor achieved a quality factor greater than 9 at 5 GHz and a self-resonance frequency well above 15 GHz. The inductor is tunable and the inductance variation is greater than 8%.
Keywords
Q-factor; inductors; micromechanical devices; microwave devices; tuning; 5 GHz; RF MEMS tunable inductor; inductance variation; self-resonance frequency; single-wafer micromachined radio-frequency inductor; Etching; Fabrication; Gold; Inductance; Inductors; Q factor; Radio frequency; Radiofrequency microelectromechanical systems; Silicon; Tunable circuits and devices;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwaves, Radar and Wireless Communications, 2004. MIKON-2004. 15th International Conference on
Print_ISBN
83-906662-7-8
Type
conf
DOI
10.1109/MIKON.2004.1358483
Filename
1358483
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