DocumentCode
1942119
Title
Process and Model of Short-Gate Diffused InGaAs JFET´s for Integrated Pin - FET Photodetector
Author
Nguyen, L. ; Allovon, M. ; Blanconnier, P. ; Bourdon, B. ; Caquot, E. ; Scavennec, A.
Author_Institution
Centre National d´´Etudes des Telecommunications, Laboratoire de Bagneux, 196, avenue Henri Ravera, 92220 Bagneux France
fYear
1987
fDate
14-17 Sept. 1987
Firstpage
943
Lastpage
946
Abstract
Junction Field Effect Transistors with a micron diffused gate have been fabricated on InGaAs/InP grown by molecular beam epitaxy (MBE). Transconductances higher than 200 mS/mm with a channel doping level of 2.1016 cm¿3 have been measured. A compact model for PIN - FET photodetector has been developed to optimize e signal to noise ratio.
Keywords
Doping; FETs; Indium gallium arsenide; Molecular beam epitaxial growth; Photodetectors; Signal to noise ratio; Silicon compounds; Substrates; Wet etching; Zinc;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1987. ESSDERC '87. 17th European
Conference_Location
Bologna, Italy
Print_ISBN
0444704779
Type
conf
Filename
5436794
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