DocumentCode
1942172
Title
The MEMS 5-in-1 Reference Materials (RM 8096 and 8097)
Author
Cassard, Janet ; Geist, Jon ; Gaitan, Michael ; Seiler, David G.
fYear
2012
fDate
19-22 March 2012
Firstpage
211
Lastpage
216
Abstract
The Microelectromechanical Systems (MEMS) 5-in-1 Reference Material (RM) contains test structures for five standard test methods on one test chip, so companies can compare their in-house measurements taken on the RM with National Institute of Standards and Technology (NIST) measurements, thereby validating their use of the documentary standard test methods. Examples of NIST reference values are given for an RM 8096 monitor chip used at NIST for stability studies.
Keywords
micromechanical devices; standards; MEMS; NIST measurements; National Institute of Standards and Technology; RM 8096; RM 8097; microelectromechanical systems; Micromechanical devices; Microscopy; Semiconductor device measurement; Strain; Stress; Thickness measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Test Structures (ICMTS), 2012 IEEE International Conference on
Conference_Location
San Diego, CA
ISSN
1071-9032
Print_ISBN
978-1-4673-1027-7
Type
conf
DOI
10.1109/ICMTS.2012.6190649
Filename
6190649
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