DocumentCode
1942305
Title
Simultaneous fabrication of thousands of holes using high power KrF excimer laser
Author
Sekizawa, N. ; Niwatsukino, Y. ; Sajiki, K. ; Nire, T.
Author_Institution
Res. Div., Komatsu Ltd., Kanagawa, Japan
Volume
1
fYear
2001
fDate
15-19 July 2001
Abstract
We have developed advanced via hole drilling system using high power KrF excimer laser and micro lens array, and fabricated 2000 holes (diameter: 50 /spl mu/m) in 40 mm square area of resin layer at once.
Keywords
diffractive optical elements; excimer lasers; laser beam machining; microlenses; printed circuit manufacture; KrF; advanced via hole drilling system; beam expander; build-up printed circuit board; diffractive optics; energy efficiency; high power excimer laser; laser drilling; microlens array; resin layer; simultaneous fabrication; thousands of holes; unstable resonator; Drilling; Energy efficiency; Focusing; Laser beams; Lenses; Optical arrays; Optical device fabrication; Optical resonators; Power lasers; Resins;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2001. CLEO/Pacific Rim 2001. The 4th Pacific Rim Conference on
Conference_Location
Chiba, Japan
Print_ISBN
0-7803-6738-3
Type
conf
DOI
10.1109/CLEOPR.2001.967853
Filename
967853
Link To Document