Fast and accurate characterizationst of interconnect capacitance network using Degenerated Exhaustive Direct Charge Measurements (DEDCM)

Continuing scaling down trend of semiconductor process node has increased the necessity of comprehensive interconnect capacitance testing, however, the measurement has only been made between limited combinations of conductor groups due to test time constrains. In this paper, we propose new interconnect capacitance measurement method, Degenerated Exhaustive Direct Charge Measurements (DEDCM). This method enables measuring all interconnect capacitance components accurately and faster.