Title :
Water as a solution for the removal of halogenated hydrocarbons in the production process of medium power diodes
Author :
Van der Wijk, Albert ; Strating, Gerard ; Schelwald, Peter
Author_Institution :
Philips Semiconductors, Eindhoven, Netherlands
Abstract :
The removal of di-chloro-methane (DCM, CH2CL2) from the production process of medium-power diodes can be accomplished by replacing the oil-derived adhesives applied in the process by sugar based adhesives. As a result, tap-water, which is harmless to the environment, can be used in all process steps which previously required the use of DCM. An additional advantage is the considerable cost reduction because of the lower price of the adhesives
Keywords :
environmental engineering; p-i-n diodes; power electronics; semiconductor device manufacture; dichloromethane removal; environment; halogenated hydrocarbons; manufacturing process; medium power diodes; oil-derived adhesives; p-i-n diodes; production process; sugar based adhesives; tap-water; Chemical technology; Glass; Hydrocarbons; Manufacturing processes; P-i-n diodes; Production; Sandblasting; Semiconductor diodes; Silicon; Solvents;
Conference_Titel :
Electronics and the Environment, 1993., Proceedings of the 1993 IEEE International Symposium on
Conference_Location :
Arlington, VA
Print_ISBN :
0-7803-0829-8
DOI :
10.1109/ISEE.1993.302838
