Title :
Relationship between sensitivity and waveguide position on diaphragm for silicon-based integrated optic pressure sensor
Author :
Yamada, A. ; Shirai, Y. ; Goto, T. ; Ohkawa, M. ; Sekine, S. ; Sato, T.
Author_Institution :
Fac. of Eng., Niigata Univ., Japan
Abstract :
We have experimentally investigated how sensitivity is dependent on the position of a waveguide passing over a diaphragm in a silicon-based integrated optic pressure sensor based on the elasto-optic effect.
Keywords :
diaphragms; elemental semiconductors; micro-optics; microsensors; optical planar waveguides; optical sensors; photoelasticity; pressure sensors; silicon; Si; crossed output polarizer; diaphragm; elasto-optic effect; integrated optic pressure sensor; phase difference; polystyrene waveguides; sensitivity dependence; straight optical waveguide; waveguide position; Facsimile; Integrated optics; Laboratories; Optical distortion; Optical interferometry; Optical polarization; Optical sensors; Optical waveguide theory; Optical waveguides; Waveguide lasers;
Conference_Titel :
Lasers and Electro-Optics, 2001. CLEO/Pacific Rim 2001. The 4th Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-6738-3
DOI :
10.1109/CLEOPR.2001.967904
