A monolithic phased array with RF MEMS technology

This paper reports a monolithic phased array implemented using RF MEMS technology. The phased array is composed of a linear array of four patch antennas and a new phase shifter design, monolithically integrated into a glass substrate. The new phase shifter design consists of two sections: one continuous and one discrete phase shifter. Combination of these two types makes it possible to give continuous and large phase shifts at the same time. The phase shifter can provide a phase shift of about 95° continuously at an operating frequency of 15 GHz. The antenna return loss (S₁₁) is about -20 dB.