• DocumentCode
    1943836
  • Title

    Determination of Excess Carrier Lifetimes in Silicon-On-Insulator Wafers by a Contactless Optical Technique

  • Author

    Yang, P.C. ; Li, Sheng S.

  • Author_Institution
    Department of Electrical Engineering, University of Florida
  • fYear
    1992
  • fDate
    6-8 Oct. 1992
  • Firstpage
    14
  • Lastpage
    15
  • Keywords
    Charge carrier lifetime; Contacts; Laser beams; Laser excitation; Optical films; Optical filters; Semiconductor films; Silicon on insulator technology; Substrates; Tellurium;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    SOI Conference, 1992. IEEE International
  • Conference_Location
    Ponte Vedra Beach, FL
  • ISSN
    1078-621X
  • Print_ISBN
    0-7803-7439-8
  • Type

    conf

  • DOI
    10.1109/SOI.1992.664773
  • Filename
    664773
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1943836