Title : 
CAD Based Interconnect Analysis
         
        
        
            Author_Institution : 
Implementation Group, Synopsys, Mountain View, CA, USA
         
        
        
        
        
        
            Abstract : 
This paper provides an introduction and overview of interconnect modeling in integrated circuits. Resistance, capacitance, inductance and mechanical analysis are discussed.
         
        
            Keywords : 
circuit CAD; electronic engineering computing; integrated circuit design; integrated circuit interconnections; integrated circuit reliability; CAD based interconnect analysis; IC design process; capacitance extraction; inductance; integrated circuit interconnects modeling; interconnect reliability; mechanical analysis; resistance extraction; Capacitance measurement; Conductors; Copper; Dielectric materials; Etching; Inductance; Integrated circuit interconnections; Integrated circuit modeling; Parasitic capacitance; Silicon;
         
        
        
        
            Conference_Titel : 
Simulation of Semiconductor Processes and Devices, 2009. SISPAD '09. International Conference on
         
        
            Conference_Location : 
San Diego, CA
         
        
        
            Print_ISBN : 
978-1-4244-3974-8
         
        
            Electronic_ISBN : 
1946-1569
         
        
        
            DOI : 
10.1109/SISPAD.2009.5290223