• DocumentCode
    1944141
  • Title

    Effects of Ionic Doping on the Behaviors of Oxygen Vacancies in HfO2 and ZrO2: A First Principles Study

  • Author

    Zhang, Haowei ; Gao, Bin ; Yu, Shimeng ; Lai, Lin ; Zeng, Lang ; Sun, Bing ; Liu, Lifeng ; Liu, Xiaoyan ; Lu, Jing ; Han, Ruqi ; Kang, Jinfeng

  • Author_Institution
    Key Lab. of Microelectron. Devices & Circuits, Peking Univ., Beijing, China
  • fYear
    2009
  • fDate
    9-11 Sept. 2009
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    The effects of metallic ion (Al, Ti, or La) doping in HfO2 or ZrO2 on the behaviors of oxygen vacancies (V0) such as the formation energy, density of states, and migration energy were investigated by using first principles calculations. The calculations show that, 1) the doping causes an upward shift of deep V0 levels; 2) dopant radius has a weak impact on the relaxed formation energy of V0 (Ej v) but a significant impact on the unrelaxed Ef v; 3) the relaxed formation energy Ef v of V0 is remarkably reduced by trivalent ion (Al or La) doping compared to by tetravalent ion (Ti) doping; 4) Al, Ti, or La doping impacts the migration barriers of V0 along different directions.
  • Keywords
    ab initio calculations; aluminium; doping; electronic density of states; hafnium compounds; lanthanum; titanium; vacancies (crystal); zirconium compounds; HfO2:Al; HfO2:La; HfO2:Ti; ZrO2:Al; ZrO2:La; ZrO2:Ti; density of states; first principles calculation; formation energy; ionic doping effects; migration energy; oxygen vacancies; Doping; Hafnium oxide; High K dielectric materials; High-K gate dielectrics; Laboratories; Microelectronics; Neural networks; Oxygen; Physics; Zirconium;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Simulation of Semiconductor Processes and Devices, 2009. SISPAD '09. International Conference on
  • Conference_Location
    San Diego, CA
  • ISSN
    1946-1569
  • Print_ISBN
    978-1-4244-3974-8
  • Electronic_ISBN
    1946-1569
  • Type

    conf

  • DOI
    10.1109/SISPAD.2009.5290225
  • Filename
    5290225