Title :
Vacuum ultraviolet, 157 nm video-rate imaging with a reflective optics and a back-thinned CCD camera
Author :
Kozeki, T. ; Zhenlin Liu ; Sarukura, N. ; Hirano, M. ; Hosono, H.
Author_Institution :
ERATO, Japan Sci. & Technol. Corp., Kawasaki, Japan
Abstract :
A reflective optics system is developed for VUV-region imaging in real time. This is the first demonstration of a video-rate imaging at a wavelength of 157 nm.
Keywords :
CCD image sensors; X-ray imaging; X-ray optics; mirrors; optical focusing; reflectivity; ultraviolet detectors; 157 nm; VUV video-rate imaging; back-thinned CCD camera; real time; reflective optics; vacuum ultraviolet video-rate imaging; video-rate imaging; Band pass filters; Charge coupled devices; Charge-coupled image sensors; Focusing; Head; Mirrors; Optical filters; Optical imaging; Optical sensors; Real time systems;
Conference_Titel :
Lasers and Electro-Optics, 2001. CLEO/Pacific Rim 2001. The 4th Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-6738-3
DOI :
10.1109/CLEOPR.2001.967933
