Title :
Electron Traps, Structural Change, and Hydrogen Related Simox Defects
Author :
Conley, J.F. ; Lenahan, P.M. ; Roitman, P.
Author_Institution :
The Pennsylvania State University, PA
Keywords :
Charge carrier processes; Charge measurement; Current measurement; Electron traps; Hydrogen; Lighting; NIST; Paramagnetic materials; Paramagnetic resonance; Silicon;
Conference_Titel :
SOI Conference, 1992. IEEE International
Conference_Location :
Ponte Vedra Beach, FL
Print_ISBN :
0-7803-7439-8
DOI :
10.1109/SOI.1992.664778