Title :
Highly ordered hole-array architecture in anodic alumina for optical devices
Author :
Masuda, H. ; Asoh, H. ; Ohya, M. ; Nakao, M. ; Yokoo, A. ; Tamamura, T. ; Nishio, K.
Author_Institution :
Dept. of Appl. Chem., Tokyo Metropolitan Univ., Japan
Abstract :
A highly ordered nanohole-array architecture with high aspect ratios was fabricated based on the anodization of Al. In the report, two types of fabrication processes for highly ordered nanohole arrays, and their application to several kinds of nanofabrication for optical devices are described.
Keywords :
alumina; anodisation; nanotechnology; optical arrays; optical fabrication; periodic structures; photonic band gap; porous materials; Al; Al/sub 2/O/sub 3/; anodic alumina; anodization; high aspect ratios; highly ordered; nanofabrication; nanohole-array architecture; naturally occurring long-range ordering; optical devices; periodic structure; porous alumina; pretexturing; self-ordered material; two-dimensional photonic band-gap; Artificial intelligence; Chemistry; Dry etching; Lattices; Nanofabrication; Nanoscale devices; Optical arrays; Optical device fabrication; Optical devices; Substrates;
Conference_Titel :
Lasers and Electro-Optics, 2001. CLEO/Pacific Rim 2001. The 4th Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-6738-3
DOI :
10.1109/CLEOPR.2001.967960
