DocumentCode :
1945428
Title :
Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)
fYear :
2000
fDate :
23-27 Jan. 2000
Abstract :
The following topics were dealt with: electrostatic actuators; piezoelectric actuators; fluidics handling; sensors; applications; modelling and design; materials and metrology; bonding and packaging; biological devices; optical devices; accelerometers and gyroscopes; 3D structures
Keywords :
micromechanical devices; 3D structures; MEMS; accelerometers; applications; biological devices; bonding; design; electrostatic actuators; fluidics handling; gyroscopes; metrology; modelling; optical devices; packaging; piezoelectric actuators; sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on
Conference_Location :
Miyazaki, Japan
ISSN :
1084-6999
Print_ISBN :
0-7803-5273-4
Type :
conf
DOI :
10.1109/MEMSYS.2000.838475
Filename :
838475
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1945428
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