Title :
A Detailed Investigation of the Pseudo-Mos Transistor for in Situ Characterization of Soi Wafers
Author :
Ouisse, T. ; Morfouli, P. ; Faynot, O. ; Seghir, H. ; Margai, J. ; Cristoloveanu, S.
Author_Institution :
LETI (CEA-Technologies Avancees), France
Keywords :
Channel bank filters; Doping; MOSFET circuits; Probes; Semiconductor device modeling; Semiconductor films; Semiconductor process modeling; Substrates; Threshold voltage; Transconductance;
Conference_Titel :
SOI Conference, 1992. IEEE International
Conference_Location :
Ponte Vedra Beach, FL
Print_ISBN :
0-7803-7439-8
DOI :
10.1109/SOI.1992.664780