DocumentCode
1945518
Title
A Detailed Investigation of the Pseudo-Mos Transistor for in Situ Characterization of Soi Wafers
Author
Ouisse, T. ; Morfouli, P. ; Faynot, O. ; Seghir, H. ; Margai, J. ; Cristoloveanu, S.
Author_Institution
LETI (CEA-Technologies Avancees), France
fYear
1992
fDate
6-8 Oct. 1992
Firstpage
30
Lastpage
31
Keywords
Channel bank filters; Doping; MOSFET circuits; Probes; Semiconductor device modeling; Semiconductor films; Semiconductor process modeling; Substrates; Threshold voltage; Transconductance;
fLanguage
English
Publisher
ieee
Conference_Titel
SOI Conference, 1992. IEEE International
Conference_Location
Ponte Vedra Beach, FL
ISSN
1078-621X
Print_ISBN
0-7803-7439-8
Type
conf
DOI
10.1109/SOI.1992.664780
Filename
664780
Link To Document