• DocumentCode
    1945713
  • Title

    A new mechanism for Hillock formation over electrodeposited thin tin film

  • Author

    Cheng, Jing ; Chen, Samuel ; Vianco, Paul ; Li, James C.M.

  • Author_Institution
    Mater. Sci. Program, Univ. of Rochester, Rochester, NY
  • fYear
    2008
  • fDate
    27-30 May 2008
  • Firstpage
    472
  • Lastpage
    477
  • Abstract
    Tin film about one micron thick was electroplated over a silicon wafer pre-coated with a layer of Cr and another layer of Ni by evaporation. A special sample holder was designed to apply compressive stresses in the electroplated tin film. After incubation in a vacuum oven at 160degC for 7 days, huge hillocks about 10-30 mum diameter and 30-150 mum length grew with a density about 7 per square mm. On the top of the hillocks there appeared a polycrystalline layer similar to the tin film. FIB technique was used to reveal the inner microstructure of these huge hillocks. They are single crystals of Sn with [001] direction perpendicular to the film. The flow path of tin atoms appears to originate from the stressed Sn/Ni interface moving along the interface radially toward the root of the hillock.
  • Keywords
    electroplated coatings; electroplating; elemental semiconductors; focused ion beam technology; internal stresses; semiconductor growth; semiconductor thin films; tin; FIB technique; Sn; compressive stresses; electrodeposition; electroplating; evaporation; hillock; temperature 160 degC; thin film; time 7 day; Atomic layer deposition; Compressive stress; Fluid flow; Grain boundaries; Intermetallic; Material storage; Residual stresses; Stress measurement; Substrates; Tin; FIB; flow path; growth mechanism; tin hillocks; tin whiskers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Components and Technology Conference, 2008. ECTC 2008. 58th
  • Conference_Location
    Lake Buena Vista, FL
  • ISSN
    0569-5503
  • Print_ISBN
    978-1-4244-2230-2
  • Electronic_ISBN
    0569-5503
  • Type

    conf

  • DOI
    10.1109/ECTC.2008.4550014
  • Filename
    4550014