Title :
A check-valved silicone diaphragm pump
Author :
Meng, Ellis ; Wang, Xuan-Qi ; Mak, Howen ; Tai, Yu-Chong
Author_Institution :
Micromachining Lab., California Inst. of Technol., Pasadena, CA, USA
Abstract :
Two generations of check-valved silicone rubber diaphragm pumps are presented. Significant improvements have been made from pump to pump including the design and fabrication of a double-sided check valve, a bossed silicone membrane, and silicone gaskets. Water flow rates of up to 13 ml/min and a maximum back pressure of 5.9 kPa were achieved through pneumatic operation with an external compressed air source. Using a custom designed solenoid actuator, flow rates of up to 4.5 ml/min and a maximum back pressure of 2.1 kPa have been demonstrated
Keywords :
diaphragms; etching; micromachining; micropumps; microvalves; pneumatic control equipment; silicone rubber; 2.1 kPa; 5.9 kPa; bossed silicone membrane; double-sided check valve; etching; external compressed air source; fabrication; maximum back pressure; packaging; parylene check valve; pneumatic operation; silicone gaskets; silicone rubber diaphragm pump; solenoid actuator; water flow rates; Assembly; Biomembranes; Fabrication; Gaskets; Micropumps; Orifices; Pumps; Rubber; Solenoids; Valves;
Conference_Titel :
Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on
Conference_Location :
Miyazaki
Print_ISBN :
0-7803-5273-4
DOI :
10.1109/MEMSYS.2000.838491
