Title :
Dual-cantilever AFM probe for combining fast and coarse imaging with high-resolution imaging
Author :
Despont, M. ; Takahashi, Hiroki ; Ichihara, S. ; Shirakawabe, Y. ; Shimizu, N. ; Inoue, A. ; Haberle, W. ; Binnig, G.K. ; Vettiger, P.
Author_Institution :
Res. Lab., IBM Res. Div., Ruschlikon, Switzerland
Abstract :
This paper presents a new scanning probe concept based on an integrated dual-cantilever device, which has been designed to reduce the tip-wear problem. It consists of two cantilevers, one having a robust blunt tip, the other having a sharp tip. By means of integrated bimorph actuators, such a cantilever can be used to switch between coarse and fast imaging with the blunt tip, and high-resolution imaging with the sharp tip. Hence the delicate sharp tip is used only when high resolution is required, which greatly increases the probe´s lifetime. A high-sensitivity, constricted piezoresistive strain sensor is used for high-resolution imaging. Imaging with the dual-cantilever probe has been demonstrated successfully
Keywords :
atomic force microscopy; AFM; blunt tip; coarse imaging; dual-cantilever scanning probe; fast imaging; high-resolution imaging; integrated bimorph actuator; piezoresistive strain sensor; sharp tip; wear; Actuators; Atomic force microscopy; Capacitive sensors; High-resolution imaging; Image sensors; Instruments; Piezoresistance; Probes; Robustness; Switches;
Conference_Titel :
Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on
Conference_Location :
Miyazaki
Print_ISBN :
0-7803-5273-4
DOI :
10.1109/MEMSYS.2000.838502