Title :
Total Dose Radiation Hardness of Bonded Soi Wafers
Author :
McKitterick, John B. ; Caviglia, Anthony ; Goetz, George ; Maszara, W.P.
Author_Institution :
Allied-Signal Aerospace Technology Center, Columbia, MD
Keywords :
Annealing; Data mining; Etching; Insulation; Radiation hardening; Semiconductor films; Silicon on insulator technology; Temperature; Voltage; Wafer bonding;
Conference_Titel :
SOI Conference, 1992. IEEE International
Conference_Location :
Ponte Vedra Beach, FL
Print_ISBN :
0-7803-7439-8
DOI :
10.1109/SOI.1992.664783
