One mask nickel micro-fabricated reed relay

Author

Roth, S. ; Marxer, C. ; Feusier, G. ; de Rooij, N.F.

Author_Institution

IMT, Neuchatel Univ., Switzerland

fYear

2000

fDate

23-27 Jan 2000

Firstpage

176

Lastpage

180

Abstract

This paper reports on the fabrication and experimental results of a reed relay for end-course detection application. The end-course is detected by approaching an external magnet near the device. Nickel material has been chosen for the realisation of the device because of its good magnetic properties and its ability to be electrodeposited. The fabrication process requires a single photolithography step. The relay has been fabricated using a 55 μm thick positive resist photopatterning process developed in our laboratory. Electrical, static and dynamic characterisations have been performed. The final chip dimensions are 3 mm long, 1 mm wide and 0.4 mm thick

Keywords

electrodeposition; electromagnetic actuators; microactuators; micromachining; nickel; photolithography; reed relays; 0.4 mm; 1 mm; 3 mm; 55 micron; Ni; dynamic characterisation; electrical characterisation; electrodeposited nickel; end-course detection application; fabrication process; micro-fabricated reed relay; one mask process; partial etching; positive resist photopatterning; single photolithography step; static characterisation; Connectors; Fabrication; Geometry; Lithography; Magnetic fields; Nickel; Relays; Resists; Springs; Switches;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on

Conference_Location

Miyazaki

ISSN

1084-6999

Print_ISBN

0-7803-5273-4

Type

conf

DOI

10.1109/MEMSYS.2000.838512

Filename

838512