Static friction in elastic adhesive MEMS contacts, models and experiment

Author

Tas, N.R. ; Gui, C. ; Elwenspoek, M.

Author_Institution

MESA Res. Inst., Twente Univ., Enschede, Netherlands

fYear

2000

fDate

23-27 Jan 2000

Firstpage

193

Lastpage

198

Abstract

Static friction in shearing mode can be expressed as the product of the shear strength of the interface and the real contact area. The influence of roughness on friction in elastic adhesive contact is analyzed. Special attention is paid to low loading conditions, in which the number of contact points is small. The models are used to analyze a friction experiment in a MEMS friction meter

Keywords

adhesion; elastic deformation; elastic limit; mechanical contact; micromechanical devices; semiconductor device models; shear strength; sliding friction; stiction; surface topography; MEMS friction meter; contact mechanics; elastic adhesive MEMS contacts; elastic deformation; elastic limit; interface shear strength; low loading conditions; models; multi-asperity contact; real contact area; roughness influence; shearing mode; single asperity contact; sliding contacts; static friction; Adhesives; Friction; Microelectromechanical devices; Micromechanical devices; Micromotors; Rough surfaces; Shearing; Silicon; Surface roughness; Surface topography;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on

Conference_Location

Miyazaki

ISSN

1084-6999

Print_ISBN

0-7803-5273-4

Type

conf

DOI

10.1109/MEMSYS.2000.838515

Filename

838515