DocumentCode
1946650
Title
Improvement of GaAs Epitaxial Layers by Indium Incorporation
Author
Laurenti, J.P. ; Roentgen, P. ; Wolter, K. ; Seibert, K. ; Kurz, H. ; Camassel, J.
Author_Institution
Groupe d´´Etude des Semiconducteurs, université des Sciences et Techniques du Languedoc, F-34060 Montpellier Cedex, France
fYear
1988
fDate
13-16 Sept. 1988
Abstract
The influence of indium incorporation (0 - 6.5Ã1019cm-) in GaAs OMVPE layers, on near-band-edge optical properties and deep trap content has been investigated. The bound exciton and donor-acceptor recombination lines in photoluminescence (PL) spectra shift toward lower energies versus indium content. This indicates the formation of a very dilute GaInAs ternary compound. The corresponding PL intensities increase by a factor of 10. This improvement in the optical quality of the layers correlates with a decrease in a ratio 10 for chromium-related PL intensities. On the opposite, the EL2 concentration and depth profile determined by DLTS are not affected. We suggest that indium relaxes lattice distorsions arround residual detects and limits the formation of dislocations.
Keywords
Charge carrier processes; Energy resolution; Epitaxial layers; Excitons; Gallium arsenide; Indium; Laboratories; Lattices; Luminescence; Photoluminescence;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1988. ESSDERC '88. 18th European
Conference_Location
Montpellier, France
Print_ISBN
2868830994
Type
conf
Filename
5437011
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