Title :
Ion charge state distribution in the ECR source with pumping by millimeter-wave gyrotron radiation
Author :
Golubev, S.V. ; Razin, S.V. ; Zorin, V.G.
Author_Institution :
Inst. of Appl. Phys., Acad. of Sci., Nizhny Novgorod, Russia
Abstract :
Summary form only given. The essential increase of ECR multiply charged ion (MCI) source efficiency (that is the increase of the average charge number and current ion beams) connects with the possibility of achieving a more dense plasma and transfer to a so called quasi gas dynamic regime of the plasma confinement in magnetic traps under the use of pumping with higher frequency. The first results of an experimental investigation of ion charge state distribution in a pulse source of MCI with pumping by millimeter wave radiation of powerful gyrotron are presented.
Keywords :
gyrotrons; magnetic traps; millimetre wave tubes; plasma production; ECR source; current ion beams; dense plasma; ion charge state distribution; magnetic traps; millimeter-wave gyrotron radiation; multiply charged ion; plasma confinement; quasi gas dynamic regime; Boron; Doping; Gyrotrons; Millimeter wave technology; Plasma confinement; Plasma density; Plasma immersion ion implantation; Plasma sources; Substrates; Voltage;
Conference_Titel :
Plasma Science, 1997. IEEE Conference Record - Abstracts., 1997 IEEE International Conference on
Conference_Location :
San Diego, CA, USA
Print_ISBN :
0-7803-3990-8
DOI :
10.1109/PLASMA.1997.605218
