• DocumentCode
    1946874
  • Title

    RTP Optical Pyrometer Temperature Sensing Anomalies on Simox

  • Author

    Tyson, S.M.

  • Author_Institution
    United Technologies Microelectronics Center, Colorado
  • fYear
    1992
  • fDate
    6-8 Oct. 1992
  • Firstpage
    46
  • Lastpage
    47
  • Keywords
    Optical films; Optical materials; Optical sensors; Oxidation; Rapid thermal processing; Semiconductor films; Silicon; Temperature distribution; Temperature sensors; Thickness measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    SOI Conference, 1992. IEEE International
  • Conference_Location
    Ponte Vedra Beach, FL
  • ISSN
    1078-621X
  • Print_ISBN
    0-7803-7439-8
  • Type

    conf

  • DOI
    10.1109/SOI.1992.664787
  • Filename
    664787
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1946874