DocumentCode :
1946874
Title :
RTP Optical Pyrometer Temperature Sensing Anomalies on Simox
Author :
Tyson, S.M.
Author_Institution :
United Technologies Microelectronics Center, Colorado
fYear :
1992
fDate :
6-8 Oct. 1992
Firstpage :
46
Lastpage :
47
Keywords :
Optical films; Optical materials; Optical sensors; Oxidation; Rapid thermal processing; Semiconductor films; Silicon; Temperature distribution; Temperature sensors; Thickness measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
SOI Conference, 1992. IEEE International
Conference_Location :
Ponte Vedra Beach, FL
ISSN :
1078-621X
Print_ISBN :
0-7803-7439-8
Type :
conf
DOI :
10.1109/SOI.1992.664787
Filename :
664787
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1946874
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