A foundry fabricated high-speed rotation sensor using off-chip RF wireless signal transmission

Author

Sun, Winston ; Ho, Antony W T ; Li, Wen J. ; Mai, John D. ; Mei, Tao

Author_Institution

Dept. of Mech. & Autom. Eng., Chinese Univ. of Hong Kong, Shatin, Hong Kong

fYear

2000

fDate

23-27 Jan 2000

Firstpage

358

Lastpage

363

Abstract

A novel MEMS surface-micromachined non-contact high-speed rotation sensor with total surface area under 4 mm² was developed using the MCNC Multi-User MEMS Processes (MUMPs). This paper reports the initial characterization of the sensor, including rotation and vibration tests. Initial results indicate that this piezoresistive sensor is capable of wirelessly measuring rotation speeds at ~2Hz/rpm/V with 5V input in the 100 to 6000 rpm rotation range. We believe our groundwork will allow the MEMS community to use the MUMPs foundry service to design simple and reliable high-speed rotation sensors that can be interfaced with commercial wireless chips for signal transmission

Keywords

angular measurement; high-speed techniques; micromachining; microsensors; piezoresistive devices; remote sensing; 5 V; MCNC multi-user MEMS process; MUMPs foundry fabrication; noncontact high-speed rotation sensor; off-chip RF wireless signal transmission; piezoresistive sensor; surface micromachining; Foundries; Micromechanical devices; Piezoresistance; Radio frequency; Rotation measurement; Semiconductor device measurement; Sensor phenomena and characterization; Signal design; Testing; Velocity measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on

Conference_Location

Miyazaki

ISSN

1084-6999

Print_ISBN

0-7803-5273-4

Type

conf

DOI

10.1109/MEMSYS.2000.838543

Filename

838543