• DocumentCode
    1947090
  • Title

    Performance enhancement of a closed-loop accelerometer tuned close to its instability regime

  • Author

    Korniienko, A. ; Colinet, E. ; Condemine, C.

  • Author_Institution
    CEA-LETI-MINATEC, Grenoble, France
  • fYear
    2009
  • fDate
    June 28 2009-July 1 2009
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    A closed-loop micro-accelerometer is presented where its instability regime is used in order to enhance its static gain. Sensitivity functions are increased in low frequencies and therefore any acceleration applied on the proof mass is better rejected than in conventional closed-loop approach. To design a robust controller, an identification procedure of the instable structure is presented as well. Finally the signal reconstruction of the applied acceleration is made trough a Kalman filter. Simulation results are given and demonstrate the efficiency of the proposed approach.
  • Keywords
    Kalman filters; accelerometers; closed loop systems; micromechanical devices; robust control; signal reconstruction; Kalman filter; closed-loop microaccelerometer; instability regime; proof mass; robust controller; sensitivity function; signal reconstruction; Acceleration; Accelerometers; Capacitance; Displacement control; Electrodes; Electrostatic actuators; Force feedback; Frequency; Performance gain; Weight control;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Circuits and Systems and TAISA Conference, 2009. NEWCAS-TAISA '09. Joint IEEE North-East Workshop on
  • Conference_Location
    Toulouse
  • Print_ISBN
    978-1-4244-4573-8
  • Electronic_ISBN
    978-1-4244-4574-5
  • Type

    conf

  • DOI
    10.1109/NEWCAS.2009.5290485
  • Filename
    5290485