• DocumentCode
    1947098
  • Title

    Atomic Force Microscopy As a Technique for Simox Material Inspection and Process Characterization

  • Author

    Netherton, S.W. ; Tyson, S.M. ; Matia, G. ; Tanski, William ; Carroll, Roger

  • Author_Institution
    United Technologies Microelectronics Center, Colorado
  • fYear
    1992
  • fDate
    6-8 Oct. 1992
  • Firstpage
    48
  • Lastpage
    49
  • Keywords
    Atomic force microscopy; Atomic measurements; Density measurement; Etching; Inspection; Plasma applications; Plasma density; Rough surfaces; Silicon; Surface roughness;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    SOI Conference, 1992. IEEE International
  • Conference_Location
    Ponte Vedra Beach, FL
  • ISSN
    1078-621X
  • Print_ISBN
    0-7803-7439-8
  • Type

    conf

  • DOI
    10.1109/SOI.1992.664788
  • Filename
    664788
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1947098